MORPHOLOGY CONTROL IN PARTICLE PREPARATION BY AEROSOL METHOD

摘要

Aerosol processing of materials such as (i) gas-to-particle conversion process (e.g., Chemical Vapor Deposition (CVD) method) and (ii) liquid (or droplet)-to-particle conversion process (e.g., spray pyrolysis) has become of major interest to produce novel submicron- or nanometer-sized particulate material used in electronic and chemical industries. After reviewing recent theoretical and experimental researches on the evaluation of properties and morphology of fine particles by the CVD and spray pyrolysis methods, the importance of the process engineering approach for aerosol processing of materials and the use of advanced aerosol measurement technology have been pointed out.