Prior to refine an ultra-high purity material, it is necessary to estimate the surface cleanness of a base material. In this report, the cleaning method of a surface for refining of an ultra-high purity aluminum has been studied. Aluminum sample of 99.999 percent purity was polished mechanically and electrically and washed with various solvents. Surface composition and a depth profile near the surface were examined. Based on the experimental results, surface structure of an ultra-high purity aluminum was discussed.
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