Industrial scale manufacture of solar absorbent multilayers by MF-pulsed plasma technology

摘要

Solar absorbers ensure an extremely high efficiency in solar energy utilization. For this reason there is an increasing demand for high quality, highly durable and cost reasonable absorber units. The Medium Frequency (MF) Pulsed Plasma Technologyopens unique possibilities to manufacture thin film multilayer coatings that meet these demands.We will present a new industrial coater for the deposition of a-C:H/Cr based solar absorbent coatings onto one meter wide copper strip. The essential process steps are heating, MF ion etching, reactive MF-dual magnetron sputtering of gradedChromium-Carbon layers and the magnetically enhanced MFPECVD of an a-C:H cover layer. High performance solar absorbers which meet the IEA Performance Criterion are being manufactured.