The Design and Fabrication of a 2560*2048 Pixel Microdisplay Chip

摘要

In the ESPRIT project MOSAREL (Monocrystalline Silicon Active matrix REflective Light valve), a GXGA (2560*2048 pixels) microdisplay with 15 μm pixels is developed. In this paper, we discuss the design and processing aspects and present the first evaluation results.