YBCO deposition on large substrates up to 9' in diameter

摘要

High quality YBa_2CU_3O_7 thin films on areas of up to 9" in diameter have been grown by reactive thermal co-evaporation using a rotating substrate holder. The technique also allows double sided depsoition for filter applications. A scanning inductive j_c probe is used to monitor the homogeneity of critical current densities which are typically > MA/cm~2 on both sides. Surface resistance values are found to be below 500 mu OMEGA direct a 10 GHz. On biaxially aligned buffer layers on polycry-stalline sustrates j_c values of 1.4 MA/cm~2 are achieved at 77K as well.