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An Evaluation of Surface Finish and Flush-Up Procedures for High Purity HCI Gas Distribution Systems

机译：高纯度HCI气体分配系统表面光洁度和冲洗程序的评价

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《IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop》|2001年||共7页
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Duguid R.; Coder S.; Institute of Electric and Electronic Engineer;
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中图分类自动化技术、计算机技术;
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