Spectra and diffraction patterns of multi layr thin-film phosphors Zn_2SiO_4:Mn, ZnGa_2O_4:Cr, ZnGa_2O_4:Mn, Y_2SiO_5:Ce, Y_2O_3:Eu, and ZnO:Zn grown by ion-plasma deposition and post thermal annealing are presented in this work. Influence of indium-tin oxide (ITO) and ZnO interlayers on these properties is investigated. Thinpfilm multi-layer RGB phosphor triads are developed.
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