Material Design of Transition Metal Nitrides for Hard Coatings by Metal and Nonmetal Atom Substitution

摘要

Cr-Me-N-O (Me; Ni, Cu and Mg) thin films have been designed and successfully prepared by the pulsed laser deposition (PLD) method. It was found that Me, which form the monoxide MeO, are effective for hardening the Cr(N,O) thin films.