Two innovative technologies invented by the authors are employed in a two-axis ultraprecision machine tool. The first technology employed is an Angstrom positioning mechanism using Twist-roller Friction Drive (TFD). The positioning resolution of the mechanism can be 0.5nm. The second technology is an active control aerostatic guideway using Active Inherent Restrictors (AIRs). The straightness of motion of the guideway can be less than 20nm. A single point diamond turning of an aluminum alloy performed on this machine tool shows that the straightness and the roughness of the turned surface are 0.lμm and 4nm (Ra), respectively.
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