This paper proposes a modeling method of multi-port on-chip inductors considering mutual components. Mutual inductances in a multi-port inductor influence each other. In this paper, self and mutual inductances are derived from S-parameters by using a matrix-decomposition technique. An equivalent circuit model for multi-port inductors is presented, and extracted results using measured S-parameters are demonstrated. The average errors of L and Q are 2.1% and 10.0%, respectively.
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