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Thermocompression bonding of aluminum bumps in TAB applications

机译:铝块在标签应用中的热压键合

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Tape automated bonding (TAB) technology has been widely used in low cost consumer products as well as in high performance computer applications. TAB is an important chip-level interconnection scheme which enables VLSI devices to be packaged as direct chip attach (DCA) or chip-on-board (COB) format. Two key issues of TAB technology are discussed in this paper: wafer bumping and inner lead bonding. Specifically, aluminum bump technology developed for TAB applications is reviewed in comparison with the conventional wafer bumping process. Thermocompression bonding experiment is conducted to define a bonding process window of the pure Al bump. Although the pure Al bump can be bonded for a high bond strength, an excessive plastic deformation is commonly observed, which can dismiss the original purpose of the bump structure. In order to reduce the bump deformation, Al-alloy bumps are fabricated by adding a small amount of an alloying element to the Al matrix, such as Ni, Cr, Cu and others. The harder Al-alloy bumps are bonded with a less bump deformation and a higher pull strength. By this investigation, a general relationship between the pull strength and bump deformation is established for the Al and Al-alloy bumps. A desired bump hardness is recommended for the successful thermocompression bonding of the Al bumps.
机译:磁带自动粘合(标签)技术已广泛用于低成本消费产品以及高性能计算机应用。选项卡是一个重要的芯片级互连方案,使VLSI设备能够打包为直接芯片附件(DCA)或芯片板上(COB)格式。本文讨论了标签技术的两个关键问题:晶圆凸块和内引线键合。具体而言,与传统的晶片碰撞过程相比,综述了为标签应用开发的铝凸块技术。进行热压粘合实验以限定纯Al凸块的键合工艺窗口。尽管可以粘合纯的Al凸块以获得高粘合强度,但通常观察到过量的塑性变形,这可以忽略凸块结构的原始目的。为了减小凸块变形,通过向Al基质中加入少量合金元素,例如Ni,Cr,Cu等,通过将铝合金凸块制造。较硬的Al合金凸块与较少的凸块变形和更高的拉强强度粘合。通过该研究,为Al和Al合金凸块建立了拉力和凸块变形之间的一般关系。建议用于Al凸块的成功热压键合的期望的凸块硬度。

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