The operation and testing of a combined microactuator/microsensor system for use in a high speed jet are presented. Electrostatic actuators have been fabricated using a bulk-silicon dissolved-wafer process, and are more than 12 /spl mu/m in thickness to achieve a large stiffness in the z-direction. The "micro" actuators resonate at a frequency of 5 kHz/14 kHz and an amplitude of 70 /spl mu/m peak-peak, generate significant disturbances into the "macro" scale jet flow, and survive operation at speeds of 210 m/s. An array of micromachined sound detectors for the detection of onset of jet screech has also been fabricated. The detectors use stress compensated PECVD silicon nitride/oxide membranes together with monocrystalline ion-implanted p/sup ++/ silicon piezoresistors to achieve high sensitivity. They have a static sensitivity of 1.1 /spl mu/V/V/spl middot/Pa with a 2% nonlinearity over an operating pressure range of 10 kPa.
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机译:提出了用于高速射流的组合微致动器/微传感器系统的操作和测试。使用散装硅溶解 - 晶片工艺制造了静电致动器,并且厚度大于12 / SPL MU / M以在Z方向上实现大的刚度。 “微量”致动器以5kHz / 14kHz的频率谐振,幅度为<70 / SPL MU / M峰峰值,产生显着的干扰,进入“宏观”跳闸射流,并在<210的速度下存活操作多发性硬化症。还制造了一种用于检测喷射尖叫声发作的微机械探测器阵列。探测器使用应力补偿PECVD氮化硅/氧化物膜与单晶离子注入的P / SUP ++ /硅压阻一起,以实现高灵敏度。它们的静灵敏度为1.1 / SPL mu / v / v / spl middot / pa,在10kPa的工作压力范围内具有2%的非线性。
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