CALIBRATION OF GAS FLOW RANGING 1 TO 45 SLM AT THE STANDARDS AND CALIBRATION LABORATORY

摘要

This paper demonstrates different configurations of the SCL's reference flow standard used in calibrating a mass flow controller at various line pressures, and elaborates on methods to improve the calibration efficiency and accuracy by using a back pressure regulator. This paper also studies the sensitivity of the reference flow standard to various line pressures. It is revealed that the deviation of relative reading errors is less than the uncertainties of the reference flow standard.