DIFFUSION VIALS FOR LOW AND ACCURATE RELEASE OF KEY-VOC IN ATMOSPHERIC CHEMISTRY AND CLEAN ROOM INDUSTRIES

摘要

Accurate VOC mixtures at ppb level are needed both for the atmospheric monitoring both for the clean room industries. Research is developing a compact diffusion generator of trace mixtures to be installed on-site. To assure the required accuracy, vials with a low and calibrated diffusion rate DR are necessary. In this paper glass vials were realized, the uncertainty budget of DR was evaluated and experimentally validated. A DR accuracy better than 3% at 200 ng/min release rate was obtained.