2-D MODELING OF LOW PRESSURE DISCHARGED CHLORINE/ARGON IN INDUCTIVELY COUPLED PLASMA

摘要

In the present paper, the two-dimensional modeling work for a low pressure discharged Chlorine/Argon gas in inductively coupled plasma (ICP) reactor is presented. Based on the multi-polar assumption, five continuity equations for five species are solved. The electron energy equation and if inductive electric field equations are coupled with the continuity equations. Using the collisionless Godyak sheath model, we calculate the ion energy distribution function (IEDF) on the substrate based on the plasma bulk parameters. Some simulation results are validated against the available experimental data.