A STUDY ON RESPONSE ANALYSIS OF PNEUMATIC VIBRATION ISOLATION TABLE LOADED BY TRANSIENT MOVEMENTS OF CARRIAGE ON IT

摘要

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., xy-stage, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass on it with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.