The study of the optical properties of In/sub 0.52/(Al/sub x/Ga/sub 1-x/)/sub 0.48/As by variable angle spectroscopic ellipsometry

摘要

The optical properties of In/sub 0.52/(Al/sub x/Ga/sub 1-x/)/sub 0.48/As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters of the E/sub 1/ and E/sub 1/+/spl Delta//sub 1/ transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between our results and the reported data is presented.