Composition of inorganic photoresists and its EBE experiment

机译：无机光致抗蚀剂的组成及其EBE实验

获取原文

页面导航

摘要
著录项
引文网络
相似文献
相关主题

摘要

We report the composition of inorganic photoresist, film making way and its EBE experiment. With the composed inorganic photoresist, the graph of 0.6 $mu@m line width is gained in our experiment.

机译：我们报告了无机光致抗蚀剂，薄膜制作方式及其EBE实验的组成。通过组成的无机光致抗蚀剂，在我们的实验中获得了0.6 $ MU @ M线宽的图。

著录项

来源
《Conference on advances in resist technology and processing》|1993年||共5页
会议地点
作者
Chang Tai Yu; Hua Yu; Fengzhen Guo; Songzu Xu; Zhougfu Qi; Xiangdong Yu; Yongkuan Liu; Li Peng; Zhongyi Zhang;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类化工机械与设备的腐蚀与防腐蚀;
关键词

相似文献

外文文献
中文文献
专利

1. Studying Composition of Al_2O_3 Thin Films Deposited by Atomic Layer Deposition (ALD) and Electron-Beam Evaporation (EBE) upon Rapid Thermal Processing [J] . Alexey Alexeevich Dronov, Darya Alexeevna Dronova, Elena Petrovna Kirilenko, International Journal of Applied Engineering Research . 2017,第4期

机译：基原子层沉积（ALD）和电子束蒸发（EBE）沉积的Al_2O_3薄膜的组合物在快速热处理时
2. Dissolved oxygen and dissolved inorganic carbon stable isotope composition and concentration fluxes across several shallow floodplain aquifers and in a diffusion experiment. [J] . Parker S. R., Darvis M. N., Poulson S. R., Biogeochemistry . 2014,第2a3期

机译：溶解氧和溶解无机碳的稳定同位素组成以及穿过几个浅滩漫滩含水层和扩散实验的浓度通量。
3. Microbial and inorganic control on the composition of clay from volcanic glass alteration experiments [J] . Cuadros J., Afsin B., Jadubansa P., The American mineralogist . 2013,第2a3期

机译：火山玻璃蚀变实验对黏土成分的微生物和无机控制
4. Composition of inorganic photoresists and its EBE experiment [C] . Chang Tai Yu, Zhejiang Univ., Hangzhou, Conference on advances in resist technology and processing . 1993

机译：无机光致抗蚀剂的组成及其EBE实验
5. Novel inorganic photoresists for three-dimensional microfabrication. [D] . George, Matthew C. 2009

机译：用于三维微加工的新型无机光刻胶。
6. On the crystal chemistry of inorganic nitrides: crystal-chemical parameters bonding behavior and opportunities in the exploration of their compositional space [O] . Olivier C. Gagné 2021

机译：在无机氮化物的晶体化学上：晶体化学参数粘接行为及其组成空间探索的机会
7. Special Articles on Organic and Inorganic Optical Materials. Positive-Type Photoresists Using Photoinitiated Formation of Pendant Amino Groups. Effects of Comonomers on Solubility Alteration and Sensitivity of the Photoresists. [O] . Masahiro TSUNOOKA, Kazuyuki KAWAMURA, Takaya Niu 1992

机译：有机和无机光学材料的特殊用品。使用光灭绝形成侧氨基的正型光致抗蚀剂。共聚单体对光致抗蚀剂溶解性改变和敏感性的影响。

Composition of inorganic photoresists and its EBE experiment

摘要

著录项

引文网络

相似文献

相关主题

期刊订阅