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New low-cost high heat flux source

机译:新的低成本高热量源

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Intense heat sources are needed to address new manufacturing techniques, such as, the Rapid Thermal Process for silicon wafer manufacturing. The current technology of high heat flux sources is the laser for its ability to do welding and cutting is well- known. The laser with its coherent radiation allows an image to be focused down to very small sizes to reach extremely high heat flux. But the laser also has problems: it is inefficient in its use because of its singular wave length and brings up OSHA safety related problems. Also heavy industrial manufacturing requires much higher total energy in addition to the high heat flux which makes the current laser system too slow to be economical. The system I am proposing starts with a parabolic curve. If the curve is rotated about the axis of the parabola, it generates the classical parabolic reflector as we know it. On the other hand, when the curve is rotated about the chord, a line passing through the focal point and perpendicular to the axis, generates a new surface called the Orthogonal Parabolic Surface. A new optical reflector geometry is presented which integrates a linear white light (continuum spectra) source through a coherent path to be focused to a very small area.
机译:需要强烈的热源来解决新的制造技术,例如硅晶片制造的快速热过程。电流高热通量源的技术是其焊接和切割能力的激光是众所周知的。具有其相干辐射的激光允许将图像聚焦到非常小的尺寸以达到极高的热通量。但激光也存在问题:由于其奇异波长,它的使用情况效率低下,并带来了OSHA安全相关问题。除了高热量通量之外,还需要重型的工业制造需要更高的总能量,这使得电流激光系统过于慢的经济。我提出的系统从抛物线曲线开始。如果曲线围绕抛物线的轴旋转,它会根据我们知道的,产生经典的抛物线反射器。另一方面,当曲线围绕和弦旋转时,通过焦点并垂直于轴线的线产生一个称为正交抛物面表面的新表面。提出了一种新的光学反射器几何形状,其通过连贯的路径集成线性白光(连续谱)源,以聚焦到非常小的区域。

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