Nanometer electrodes of 0.085- mu m width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an I/sub 2/-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filters experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained.
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机译：使用直接电子束光刻，正常的剥离技术和I / SUB 2 / -Plasma清洁系统，制造了0.085 - MU M宽度的纳米电极。这些技术已被应用于在SHF范围内用作表面声波（SAW）换能器的叉指传感器。 SAW过滤器实验在SHF范围内进行。获得最小插入损耗的滤波器为15GHz的中心频率和11GHz的24 dB处的15.0dB。
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