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A perturbative analysis of surface acoustic wave propagation and reflection in interdigital transducers.

机译:指状换能器中表面声波传播和反射的扰动分析。

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摘要

The coupling of stress and strain fields to electric fields present in anisotropic piezoelectric crystals makes them ideal for use as electromechanical transducers in a wide variety of applications. In recent years such crystals have been utilized to produce surface acoustic wave devices for signal processing applications, in which an applied metallic grating both transmits and receives, through the piezoelectric effect, electromechanical surface waves. The design of such interdigital transducers requires an accurate knowledge of wave propagation and reflection. The presence of the metal grating in addition to its ideal transduction function, by means of electrical and mechanical loading, also introduces a velocity shift as well as reflection into substrate surface waves. We seek to obtain a consistent formulation of the wave behavior due to the electrical and mechanical loading of the substrate crystal by the metallic grating. A perturbative solution up to second order in {dollar}h/lambda{dollar} is developed, where h is the maximum grating height and {dollar}lambda{dollar} the acoustic wavelength. For the operating frequencies and physical parameters of modern surface acoustic wave devices such an analysis will provide an adequate description of device behavior in many cases, thereby circumventing the need for more computationally laborious methods. Numerical calculations are presented and compared with available experimental data.
机译:应力和应变场与各向异性压电晶体中存在的电场的耦合使其成为在各种应用中用作机电换能器的理想选择。近年来,这种晶体已被用于生产用于信号处理应用的声表面波装置,其中所施加的金属光栅通过压电效应既发送又接收机电表面波。这种叉指式换能器的设计需要对波的传播和反射有准确的了解。金属光栅的存在,除了其理想的转换功能外,还通过电和机械负载,还引入了速度偏移以及反射到基板表面波中。由于金属光栅对衬底晶体的电气和机械负载,我们寻求获得一种一致的波动特性公式。提出了以hh /λ{dollar}为最高二阶的摄动解,其中h为最大光栅高度,{为声波波长。对于现代表面声波设备的工作频率和物理参数,这种分析将在许多情况下提供对设备行为的充分描述,从而避免了对计算上更费力的方法的需求。提出了数值计算并与可用的实验数据进行了比较。

著录项

  • 作者

    Thoma, Carsten Hilmar.;

  • 作者单位

    The University of Connecticut.;

  • 授予单位 The University of Connecticut.;
  • 学科 Physics Acoustics.; Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 1997
  • 页码 214 p.
  • 总页数 214
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 声学;无线电电子学、电信技术;
  • 关键词

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