Micromachined PMN-PT single crystal composite transducers -- 15#x2013;75 MHz PC-MUT

摘要

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1–3 composites with resonance frequencies of 15 MHz – 75 MHz were fabricated and characterized with coupling coefficient of 0.67 – 0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.