Development of Method and Means of Coordinate -Parametric Control in ASC for Production of Microelectronics Products

机译：坐标 - 参数控制方法和手段的开发，用于生产微电子产品

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摘要

The article describes the method of coordinate – parametric control in ASC of microelectronics products production. An attempt was made to substantiate the phenomenon of coordinate uncontrollability according to R. Kalman during the transition from ACS objects to ERP objects. Method operation algorithm is described.

机译：本文介绍了微电子产品生产中坐标参数控制的方法。在从ACS对象转换到ERP对象的转换期间，根据R. Kalman在R. Kalman期间证实了坐标不可控制的现象。方法描述操作算法。

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《IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering》|2021年|2700-2702|共3页
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Alexander V. Lebedev; Larisa G. Gagarina;
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Conferences; Production; Microelectronics; Kalman filters;

机译：会议;生产;微电子;卡尔曼过滤器;

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Development of Method and Means of Coordinate -Parametric Control in ASC for Production of Microelectronics Products

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