A Point-Diffraction Interferometer with Vibration-Desensitizing Capability

摘要

We present a new type of point-diffraction interferometer specially designed for industrial use with high immunity to external vibration encountered in the course of measurement process. The proposed interferometer uses thermally-expanded fibers instead of conventional pinholes as the point-diffraction source to obtain a high quality reference wave with an additional advantage of relatively easy alignment of optical components. Vibration desensitization is realized through a common-path configuration that allows the influence of vibration to affect both the reference and measurement waves identically so that it is subsequently cancelled out during the interference of the two waves. A spatial phase shifter is added to capture four phase-shifted interferograms simultaneously without time delay using a single camera to avoid vibration effects. Experimental results demonstrate that the proposed interferometer is capable of providing stable measurements with a level of fringe stabilization of less than 1 nanometer in a typical workshop environment equipped with no excessive ground isolation for anti-vibration.