Recent Advances in Phase Shifted Time Averaging and Stroboscopic Interferometry

摘要

Classical Time Averaging and Stroboscopic Interferometry are widely used for MEMS/MOEMS dynamic behavior investigations. Unfortunately both methods require an extensive measurement and data processing strategies in order to evaluate the information on maximum amplitude at a given load of vibrating object. In this paper the modified strategies of data processing in both techniques are introduced. These modifications allow for fast and reliable calculation of searched value, without additional complication of measurement systems. Through the paper the both approaches are discussed and experimentally verified.