Zone plate efficiency measurements with a laser-plasma source

摘要

We demonstrate a compact instrument for rapid and accurate measurements of the absolute and local efficiency of soft x-ray zone plates in the water window [M. Bertilson, et al, Rev. Sci. Instrum 78, 026103 (2007)]. The arrangement is based on a new single-line λ = 2.88 nm liquid-nitrogen-jet laser-plasma source. The versatility of the instrument enables micro and condenser zone plates with focal lengths in the range from ～200 μm to ～100 mm to be measured. We demonstrate an accurate local efficiency map of a in-house fabricated micro zone plate. Furthermore, we show how this compact instrument allows rapid feedback, to the fabrication process which is important for future improvements.