Phase-only liquid crystal spatial light modulator (SLM) has been widely used for accurate phase-manipulation inholographic display, optical tweezers, lithography, etc. Due to the nonlinear optical response of liquid crystal andmanufacturing defects, the grayscale-phase response could be different for every single SLM device. The calibration forphase modulation is needed for improving the performance of the SLM involved system. The principles of phase-onlySLM are reviewed. The main phase calibration methods for SLM are discussed and compared.
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