The optical constants -surface susceptibility and surface conductivity of atomically thin MoS_2 can be extractedfrom ellipsometric parameters using a surface current model. To improve the accuracy and ensure the repro-ducibility of the extracted optical constants, eliminating possible effects during the measurements is critical.Here, different substrates with various incidence angles in the ellipsometric measurements have been studied andthe elimination of back-reection from substrates have been investigated. Although the ellipsometric parametersvary with the incidence angles and substrates, excellent reproducibility of the extracted surface susceptibilityand surface conductivity have been achieved.
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