Prospects for creating an intense ultraviolet source based on the creation of a plasma discharge by a powerful terahertz radiation pulse

摘要

The possibility of implementing an intense source of extreme ultraviolet radiation (EUV) based on a gas-discharge plasma is investigated. The radiation source is a large-orbit pulsed gyrotron (LOG) implemented in 2008, operating on the third cyclotron harmonic with a radiation power of 0.4 kW at an operating frequency of 1 THz. Modification of the LOG allows increasing the generation power up to 4 kW by increasing the power of the electron beam and reducing the share of ohmic losses in the resonator. The proposed methods of selection of oscillation in the resonator of the gyrotron. The LOG is designed to work with an electron beam of 100 kV/1.2 A in a pulsed magnetic field of 14 T. The possibility of high-quality focusing of LOG radiation is shown. It is estimated that with a good coupling to the 1 THz radiation plasma, the plasma density will significantly exceed 1016 cm-3 at an electron temperature of 50 eV. This should provide a discharge of extreme ultraviolet light with a power of about 100 W in the range of 13–17 nm for xenon.