Design and simulation of high-power RF power supply for ICP based on Simulink

摘要

In order to design a high-power ICP (Inductive Coupled Plasma) RF power supply and verify its correctness, a class E power amplifier circuit and an automatic impedance matching circuit are built in Simulink. The analysis of the results shows that the Class E power amplifier built in this paper can meet the design requirements, and the impedance matching algorithm can achieve the maximum power output of impedance matching by adjusting the value of the matching network components. This simulation circuit based on Simulink simulates the load changes during ICP operation to verify the correctness of the power amplifier design and matching algorithm.