IEEE recommended practice for powering and grounding electronic equipment. (Color Book Series - Emerald Book)

摘要

The increasing interest in microsystems technology or MEMS(Micro-Electro-Mechanical Systems) is a result of the progress in theintegrated circuit (IC) fabrication domain, in the last decades.Nowadays, a great effort is being made to construct non-electrical partson a single chip in order to obtain monolithic multi-functional smartsensors. For this, the CAD tools must also support such a multi-domaindesign environment, including from system behavior description andsimulation to a unified layout construction. An approach to microsystemscodesign is presented, and some back-end tools (layout level) such aslayout generators, cross-section and 3D viewers, and etching simulatorsare already available