High optical power handling of pop-up microelectromechanicalmirrors

摘要

Summary form only given. Several applications ofmicroelectromechanical systems (MEMS) require handling of large opticalpowers. One specific example includes steering or switching of anoptical beam onto a photovoltaic device. In this way MEMS can beremotely powered with an incident high power optical beam. Photovoltaiccells integrated with MEMS can then convert the optical energy intoelectrical energy necessary to power the MEMS. In this paper we describethe optical damage mechanisms, as well as means of extending the opticaldamage threshold in order to handle 1 W of continuous wave incidentpower in the near infrared regime