This paper brings forward ARM and DSP structure for power quality monitoring in power station or factory. Different automatic production in industry is sensitive to different case of power quality. The new device is designed to be spot programmable to resolve the problem caused by the variation. DSP does data sampling and processing. ARM with the embedded uClinux OS deals with the communication with highlevel server by Internet. The device can work as a network terminal. Networking for power quality monitoring provides basic data for site-level and net-level assessment. FPGA simplifies the peripheral electro-circuit. The hardware schematic and software design are introduced especially the module related with voltage and current sampling, data exchange, interface for communication. The simple algorithm of power quality analysis is also included
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