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Limiting layer concentration for thin-film or narrow base devices

机译:薄膜或狭窄基础设备的极限层浓度

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Charge control theory has been applied to the determination of relationships between surface charge, carrier density and space-charge widening phenomena at PN junctions. This has brought to light a very useful relationship. It appears that a variety of thin-layer semi-conductor and even tunneling devices are limited by the onset of avalanche breakdown at the edge of the layer when the total fixed charge within the space-charge depletion region is of the order of 1012carriers/cm2. The detailed results are applied to a number of materials and devices. Limits for the design of field effect and avalanche devices of minimum extrinsic layer thickness, including varactor diodes and intrinsic barrier transistors, have been derived. One conclusion is that any silicon NPN transistor which does not punch through before avalanching occurs should have an intrinsic base sheet resistance less than 6000 ohms per square. Conversely, a field effect depletion type transistor must have a P channel exceeding this resistance to avoid avalanche limitations. Metal-base transistors also should have more than 1012effective carriers per square centimeter provided by the base layer in order to operate over an adequate voltage range. Other applications will be presented, relating to limits of doping or trap densities of the layers in a variety of thick or thin-film solid state devices.
机译:电荷控制理论已被用于确定PN结处的表面电荷,载流子密度和空间电荷加宽现象之间的关系。这揭示了一个非常有用的关系。当空间电荷耗尽区域内的总固定电荷约为10 12 载波/ cm 2 。详细结果适用于多种材料和设备。已经得出了最小外在层厚度的场效应和雪崩器件(包括变容二极管和本征势垒晶体管)的设计限制。一个结论是,任何在雪崩发生前不会击穿的硅NPN晶体管,其固有基片电阻应小于6000欧姆/平方。相反,场效应耗尽型晶体管必须具有超过该电阻的P沟道,以避免雪崩限制。为了在适当的电压范围内工作,金属基晶体管每平方厘米还应具有大于10 12 的有效载流子。将提出与在各种厚或薄膜固态器件中的层的掺杂或陷阱密度的极限有关的其他应用。

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