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An electrically tunable focusing and filtering infrared liquid-crystal device for light-field imaging and spectral imaging

机译:用于光场成像和光谱成像的电可调聚焦和滤波红外液晶装置

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摘要

In this paper, we propose a novel dual-function infrared liquid-crystal device (DF-ILCD), which can simultaneouslyperform both tunable focusing and filtering functions through applying alternating current (AC) voltage signals. The keyfunctional micro-structure of the DF-ILCD includes: two paralleled 1-mm-thick ZnSe substrates with 20-nm-thickaluminum (Al) films over their inner surfaces and a periodic repetition microholes over both substrates. The Al films actas both high-reflection films and conductive films. The conventional UV-photolithography and wet-etching process areused to fabricate an arrayed micro-hole with a diameter of 120μm and a period of 336μm over each substrate. Themicro-cavity formed between ZnSe substrates has a typical depth of ~12 μm, which is fully filled by a nematicliquid-crystal (LC) materials. Experiments demonstrate that the proposed device exhibit both filtering function based onFabry–Perot (FP) effect and electrically controlled tunable focusing function generated by the micro-hole electrodes,which is very promising for realizing both the light-field imaging and spectral imaging in the infrared wavelength range.
机译:在本文中,我们提出了一种新型的双功能红外液晶装置(DF-ILCD),该装置可以同时 通过施加交流(AC)电压信号来执行可调聚焦和滤波功能。钥匙 DF-ILCD的功能性微结构包括:两个平行的1mm厚的ZnSe基板,厚度为20nm 铝(Al)膜的内表面和两个基板上的周期性重复微孔。铝膜法案 作为高反射膜和导电膜。常规的紫外光刻和湿法蚀刻工艺是 用于在每个基板上制造直径为120μm,周期为336μm的阵列微孔。这 ZnSe衬底之间形成的微腔的典型深度约为12μm,该深度被向列相完全填充 液晶(LC)材料。实验表明,所提出的设备同时具有两种滤波功能: 法布里-珀罗(FP)效应和微孔电极产生的电控可调聚焦功能, 对于实现红外波长范围内的光场成像和光谱成像,这是非常有前途的。

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