Laser nanofabrication is a powerful technique, which could realize 3D programming of materials for the designablefabrication and flexible integration of 3D intelligent devices. No matter hard or soft materials can be manufactured ormodified through femtosecond laser. 3D fuchtional devices, including micro-electronics, machines, optics or fluidics aresuccessfully made by this powerful technology. Smart functional devices that could be controllably manipulated tocomplete predictable actuation have been readily fabricated through laser processing. Recent results on femtosecondlaser 3D nanoprinting for functional devices are demonstrated. We believe that in the near future, the femtosecond lasersmart processing technology would be widely employed to make smart materials with 3D features, contributing to thedevelopment of 3D functional materials, devices, system and robotics.
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