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Manufacturing of molds by multiphoton polymerization for microreplication of optically enhanced surfaces

机译:通过多光子聚合制造模具,以微复制光学增强表面

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Freeform and microstructured features are generated by MultiPhoton Polymerization with an ultrafast laser, on tool-steelinserts, for microreplication of optical surfaces. The generation of optical surfaces has been studied by combining lasermachining and multiphoton polymerization techniques. Resolution in the range of few microns, down to 300 nm lateraldimension, has been targeted on the optically enhanced surfaces. The microstructured surfaces have been further replicatedby injection molding on polymer components of several cm~2. The fabrication accuracy and precision has been evaluatedin terms of lateral and vertical resolution of the laser generated features, and the replicated ones. The technology aims tosimplify the assembly routes for heterogeneously integrated optoelectronics through direct overmolding of the optics onthe components (transceivers, LEDs or sensors), with drastic improvements in cost, productivity and performance.
机译:通过在工具钢上使用超快激光进行多光子聚合来生成自由形式和微结构化特征 插入物,用于光学表面的微复制。通过结合激光研究了光学表面的产生 机械加工和多光子聚合技术。分辨率在几微米的范围内,横向分辨率低至300 nm 尺寸,已经瞄准了光学增强的表面。微结构表面已被进一步复制 通过在几厘米2的聚合物组件上注塑成型。评估了制造精度和精度 在激光生成特征以及复制特征的横向和垂直分辨率方面。该技术旨在 通过直接在光学元件上进行二次成型,简化了异构集成光电子器件的组装路线 组件(收发器,LED或传感器),在成本,生产率和性能方面都有大幅度的提高。

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