The micro-grooving technology/micro-ruling technology is an efficient manufacturing technology with thesimplicity of the tool-workpiece contact and the machine axes motion. This manufacturing technology is generally usedto machine the cylindrical surface and micro grooved structures array, while this paper employs micro-ruling technologyto fabricate a new type of micro structures array. Experiment is conducted to fabricate a multi-layer micropillar arraywith a sharp diamond cutting tool by micro-grooving. Experimental results show that micro-grooving technology isfeasible for the machining of multi-layer micropillar array with submicrometer form accuracy.
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