Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication at NEC Electronics U.S.A., Inc., Electronics Arrays Division Mountain View, California

摘要

A preliminary control technology assessment survey was conducted by Battelle Columbus Laboratories at NEC Electronics U.S.A., Inc., Electronic Arrays Division, Mountain View, CA. on January 13, 1982. The survey was conducted under a U.S. Environmental Protection Agency contract funded through an Interagency Agreement with the National Institute for Occupational Safety and Health. The facility manufactures metal oxide semiconductor (MOS) integrated circuits. A variety of process operations are used at the facility that should be considered for detailed investigation. These include plasma etching, ion implantation, LPCVD, and PECVD. The effectiveness of the local exhaust ventilation of the newer wet chemical benches should be evaluated and compared to the other benches.