Numerical analysis model of impact of filling factor on correction of piston and tip/tilt was established based on Fourieroptics and Fraunhofer diffraction theory. The variation trend between PIB and rms of piton or tip/tilt was obtainedthrough numerical analysis, which includes 4 kinds of apertures, that was 3, 7, 19, 37 regular-hexagon-distributioncircular flat top beam or circular Gauss beam and 4, 9, 16, 25 square-distribution square beam. The results showed thatthe bigger filling factor was, the slower variation trend of PIB and rms of piston was. Besides, the phenomenon wasmore marked when there were more apertures for coherent beam combination. The results also showed that there was nobusiness between PIB and rms of tip/tilt. It was uncovered that, for different filling factor and apertures, if the piston wascorrected below 0.08λ and the tip/tilt was corrected below 0.25λ/q, the 80% of best PIB would be achieved.
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