Based on the phase-shifting fringe scanning projection technique using MEMS galvanometer, the threedimensionalshape measurement of the object can be realized. However, we found that the experimental results weremore sensitive to some experimental parameters. To avoid it, we introduced a light plane calibration model in the threedimensionalmeasurement system. This calibration model avoids the physical measurement of some experimentalparameters, and at the same time makes the operation more convenient and faster, and improves the stability andoperability of the experiment. Through the detection experiment of the plane, the relative root mean square relativeerror of the obtained result is 9.155mm, which is greatly improved compared with the previous experimental results,but the result is still not ideal. We discuss some factors affecting the accuracy of the system which can be improved inthe future. The experiment proved its feasibility and potential, and the Powell prism and MEMS galvanometer selectedare small in size. The dimensions of Powell prism and MEMS galvanometer are 9.0mm 8.0mm and 2.5mm 3.0mmrespectively. The miniaturization of equipment is very advantageous for achieving integration and maintenance of thedevice.
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