To improve the localization accuracy and to reduce the overall photo-damage in Single Molecule LocalizationMicroscopy (SMLM), we introduce a holography based Region-of-Interest (ROI) illumination with oblique angles.The ROI illumination is realized in two dierent application modes which oer dierent advantages. Both modes(A,B) are implemented within the same setup by modifying the illumination light using a phase-only spatial lightmodulator (SLM) twice. This allows to adaptively modify the size and the (excitation) angle of the required ROIillumination, resulting in reduced out-of focus signal and less overall phototoxicity. Mode A generates a nearlyspeckle free, circular ROI which can be obtained instantly (no iterative algorithm needed). Mode B allows torealize an arbitrarily shaped ROI but comes at the cost of a higher presence of speckle structures as well as in anincreased calculation time of the holograms. In both cases illumination angles up to 60 with high NA objectivesare realizable, enabling the eective selection of specic parts of a biological probe to be illuminated.
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