Hard X-ray microscopy is a powerful scientific tool capable of providing sub-10 nm spatial resolution imaging ofmaterial’s chemical composition and internal structure. Multilayer Laue Lenses (MLLs) have been developed and usedfor hard x-ray nanofocusing. MLLs are one dimensional X-ray diffractive optics fabricated through multilayer depositionand sectioning. An orthogonal alignment of two MLLs yields a point focus; 10 milli-degree orthogonality and sub-10μm positioning accuracy along the beam direction is required to avoid astigmatism and achieve 10 nm focal spot size at12 keV photon energy. Up-to-date, developed x-ray microscopy systems were equipped with eight degrees of nano-scalemotion to perform full alignment of individual MLL optics. Bonding of two individual lenses together in pre-determinedconfiguration significantly simplifies alignment process and makes them compatible with a more conventional ZonePlate – based microscopes. In this work, we give an overview of the existing bonding effort and present our approach tofabricate a monolithic 2D MLL optic.
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