Areal surface topography measurement is becoming more and more widespread. In this context, increased activities in thefield of standardization can be observed in order to ensure comparable measurement results. A current hot topic in the fieldof standardization is areal calibration, which is going to be defined in the upcoming standard ISO 25178-700. Besides, themetrological characteristics of the ISO 25178-600, representing the properties to be calibrated, as well as the correspondingmaterial measures of the ISO 25178-70, used for imaging, are required for a comprehensive standardization of areal calibration.It can be expected that the application of the calibration guidelines is challenging as no easy-to-implement guidelinesfor the evaluation routines will be included. In this paper, the standards required for areal calibration are brieflypresented and their metrological properties are described. A user-friendly implementation of the algorithms required forthe evaluation will be discussed in detail. The basic metrological characteristics to be evaluated are the flatness deviation,measurement noise, the topography fidelity, the amplification coefficients and linearity deviations of all axes, the x/y mappingdeviation and the topographic spatial resolution. With Two-Photon laser lithography, all required material measuresto calibrate a measurement device according to ISO 25178 can be printed on one single calibration artefact. Based on thisuniversal artefact, user-oriented evaluation routines to determine the aforementioned metrological characteristics are introducedand a software package implementing the algorithms and supporting the user effectively during the holistic calibrationof areal surface topography measuring instruments is described.
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