Insights on reflection: New ideas gained from comparing femtosecond laser development, microscopy, and patterning

摘要

The development of various forms of super-resolution microscopy have paralleled the resolution gains in lithography.From micron limited resolution 30 years ago, to nm resolution today. In biology, the fundamental direction has been towork towards increasing fine structure in the absence of pitch shrink-a fundamentally similar problem to modernlithography. There are a variety of supper-resolution techniques—depletion based, interferometric, harmonic, andmulticolor. From a theoretical perspective, both problems are bound by information transfer limits in the system andultimately by noise.