Abstract: The resonance modes and the displacement sensitivity of a dual-stage, piezoelectric micro-actuator/suspension for high track density magnetic recording systems were investigated by finite element method. Theoretical dynamic and electrostatic analyses were performed to investigate the resonance frequency of in-plane bending mode and the displacement sensitivity of the piezoelectric actuator with different shapes. Based upon the analyses of piezoelectric actuators, the optimization of piezoelectric suspension was conducted to achieve a high resonance frequency of sway mode and large displacement sensitivity. The finite element simulation results on a planar piezoelectric suspension agree quite well with the experimental measurements using a Laser Doppler Vibrometer. The optimized piezoelectric suspension demonstrates better performances than those of the planar piezoelectric suspension.!9
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