Thick-film intelligent sensors using new Du Pont and ESL hightechnology materials

摘要

The paper presents the design and technology of production ofthick-film intelligent sensors (TF-ASIC), their characteristics andapplications. The novel hybrid sensors and application specificintegrated sensors were made with the use of high technology materialsmanufactured by Du Pont Nemours Co. (USA) and ESL (USA). The authorsalso discuss the prospects of industrial and other applications of suchsensors