Utilizing production data to increase factory capacity

摘要

The amount of data that is captured by any semiconductormanufacturing shop floor control system is massive. Unfortunately, muchof the production data that is collected is rarely used. One way todetermine a factory's capacity is to determine the capacity of thefactory's bottleneck tools. If the capacity of the bottleneck tools canbe increased, then the factory's capacity will also increase. This paperdemonstrates how production and equipment state data that is usuallycollected can be used to determine where factory bottleneck tools are.Further investigation of this data with a productivity analysisframework called CUBES will identify and prioritize productivityinefficiencies with their accompanying tool capacity increases. Thisanalysis, when implemented across the manufacturing line, shouldincrease factory capacity