Precision motion control system for ultra-precision semiconductorand electronic components manufacturing

摘要

In this paper, the development of a motion control system forultra-precision semiconductor and electronic components manufacturing ispresented. The control system is generally applicable, but it isdeveloped with a particular focus on direct drive servo systems based onlinear motors. The overall control system is comprehensive, comprisingof various selected control and instrumentation components, integratedwithin a configuration of hardware architecture centred around a dSPACEDS1004 DSP processor board. These components include a precisioncomposite controller (comprising of feedforward and feedback control), adisturbance observer, an adaptive notch filter, and a geometrical errorcompensator. The hardware architecture, software development platform,user interface, and all constituent control components will beelaborated on in the paper