The longitudinal Hall-type ion source with cold electrodes are described. The source generates compensated hollow oval ion beam of 600 mm length and 50 mm width with the energy within the range of 1– 2 keV and current density of 5–20 mA/cm2. The electrons compensating ion beam are generated in additional gas discharge that is excited in the region of transverse magnetic field localization near the cathode surface. It allows one to decrease the potential of dielectric surface from 700–800 V to 100–150 V, when the ion beam energy is 1 keV. The device is successfully used for low-temperature ion beam treatment of dielectric materials and plastic rolls without damages caused positive surface charges.
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机译：描述了带有冷电极的纵向霍尔型离子源。离子源产生600 mm长，50 mm宽的补偿空心椭圆形离子束，能量在1-2 keV范围内，电流密度为5-20 mA / cm 2 。电子补偿离子束在附加的气体放电中产生，该气体放电在靠近阴极表面的横向磁场局部化区域中被激发。当离子束能量为1 keV时，它可以将电介质表面的电势从700–800 V降低到100–150V。该设备已成功用于介电材料和塑料辊的低温离子束处理，而不会造成正表面电荷损坏。
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